| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS switch for improving output processing capacity. SOLUTION: This switch is a fine processing electromagnetic switch having an insulating substrate 110, a deflective beam 120 connected to the substrate 110, a first signal passage plate 150 connected to the beam 120, a second signal passage plate 170 connected to the substrate 110, a driving plate 160 connected to the beam 120, and a driven plate 140 connected to the beam 120, and is characterized in that an armor 190 connected to the substrate 110 forms a chamber 195 for surrounding the fine processing electromagnetic switch 100, and insulating perfluorocarbon is filled in the chamber 195. COPYRIGHT: (C)2003,JPO
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