| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer-gripping device that easily builds forks, built in multistages and adjusts pitches. SOLUTION: The device is constituted by a fork for transferring a wafer, a base 2 to which the fork is fixed, and a frame to which the base 2 is fitted. A plurality of bases 2, arranged in the frame in multistage, are so supported with positioning pins that each pin 2 can oscillate separately. After the finishing of pitch adjustment for the fork, the base 2 is fixed to the frame with a fixing bolt 9. COPYRIGHT: (C)2003,JPO |
