| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample degrading device suitable for analyzing and evaluating an impurity on a surface in an arbitrary specific region, of a sample and that in the sample, and to provide an impurity analyzing method of the sample using the same. SOLUTION: This sample degrading device comprises a pressure bonding member having an opening part for dropping a solution onto the surface of the sample to be degraded, and pressure bonded to a sample face to prevent the solution from flowing out, a slide member having a through-hole for inserting the pressure bonding member, and a slidable fitting groove part at its lower end part, a plate member of the disc shape, having a strip-like cut part reaching an outer peripheral end including a center and a fitting part to the slide member on its cutting part, and a table member provided with a recessed part for placing the plate member through the sample. COPYRIGHT: (C)2003,JPO
|
