| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus having electrodes capable of performing atmospheric plasma discharge even when the treatment temperature is as high as 300°C, the discharge is performed in a high output state, and durable for a long-term continuous operation, and to provide an atmospheric plasma discharge apparatus and an atmospheric plasma discharge method capable of depositing a thin film on a base material at high speed with high performance. <P>SOLUTION: In the plasma discharge apparatus, the reaction gas containing a reactive gas between the electrodes and rare gas is in a plasma state by applying the high frequency voltage under the atmospheric pressure or under the pressure nearby between the electrodes facing each other to perform the discharge, the base material is exposed to the reaction gas in a plasma state to deposit a thin film on the base material. A base metal of the electrodes is a titanium alloy containing ≥70 mass % titanium, or titanium metal. <P>COPYRIGHT: (C)2003,JPO |
