METHOD AND DEVICE FOR FILM THICKNESS MONITOR LIGHT WAVELENGTH DETERMINATION, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To determine the wavelength of monitor light capable of reducing the optical film thickness error due to the relative variation of the monitor light wavelength. SOLUTION: The invention provides a device for film thickness monitor light wavelength determination 21 that determines the wavelength of the monitor light which is irradiated at an optical film F during film formation on a body to be film-formed 6 and is transmitted/reflected from the optical film F. The device for film thickness monitor light wavelength determination 21 has a means that calculates a first stopping index value associated with the light amount variation of the monitor light by each wavelength in a plurality of candidate wavelengths of the monitor light for stopping the film formation when the optical film F reaches a desired film thickness, and a means that determines the candidate wavelength of the monitor light among the plurality of candidate wavelengths based on the derived first stopping index value by each candidate wavelength. COPYRIGHT: (C)2003,JPO