DEVICE OF MANUFACTURING ALIGNMENT LAYER OF REFLECTION TYPE LIQUID CRYSTAL DISPLAY ELEMENT AND LIQUID CRYSTAL DISPLAY ELEMENT AND METHOD OF MANUFACTURING ALIGNMENT LAYER OF LIQUID CRYSTAL DISPLAY ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a liquid crystal display element having an alignment layer uniformly formed with the columnar structure angles of substrates on the substrates. SOLUTION: The method of manufacturing the alignment layer of a liquid crystal display element 10 formed by sealing liquid crystals 6 between at least two substrates 2 (4) comprises first heating a substrate tray 33 mounted with the substrate in a first load locking chamber 37 in forming silicon dioxide (SiOx: 1.0≤x≤2.0) 12 as the alignment layer 14, then irradiating the substrate surface with silicon oxide as scattering matter from an angle of 45°or 60°from the normal direction of the substrate surface by a vacuum vapor deposition process while continuously or intermittently moving the substrate tray under heating in a deposition chamber 41, and thereafter cooling the substrate tray in a second load locking chamber 50 thereby obtaining the substrate 2 (4) formed with the alignment layer of the silicon oxide. COPYRIGHT: (C)2003,JPO