| 摘要 |
PROBLEM TO BE SOLVED: To provide a lithographic apparatus and a method of manufacturing devices. SOLUTION: Undesirable vibrations of optical elements 10, 50, and 60 are reduced in the projection system of a lithographic projection apparatus, using reaction masses 14, 54, and 64 and actuators 15, 55, and 65. The reactive masses 14, 54, and 64 can be mechanically connected only to optical elements 50, 60 or can also be mounted compliantly to a projection system frame 11. COPYRIGHT: (C)2003,JPO
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