| 摘要 |
PROBLEM TO BE SOLVED: To provide a frequency controller for a quartz resonator in which the frequency of the quartz resonator can be exactly controlled by ion beam etching. SOLUTION: A device for implementing a frequency control method for the quartz resonator has an ion gun having an anode and a hot cathode inside a vacuum container and is configured by having a mechanism for monitoring a discharge current between these anode and hot cathode and a mechanism for controlling the power of the hot cathode to keep constant the discharge current. Thus, a frequency shift-back quantity after the end of ion beam etching in the frequency control for the quartz resonator can be fixed such that highly accurate frequency control is enabled. COPYRIGHT: (C)2003,JPO
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