| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus, having a probe card for enabling appropriate inspection of a work piece even when it is heated or cooled. SOLUTION: The inspection apparatus, having a performance substrate on which inspection terminals are mounted; a contactor substrate on which a probe to make contact with the work piece for inspection is mounted; and the probe card, interposed between the probe of the contactor substrate and the terminals of the performance substrate, wherein the probe card comprises a multilayered substrate formed by laminating a thin film of resin on a ceramic plate. COPYRIGHT: (C)2003,JPO
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