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发明名称
Halbleiterdehnungssensoren mit pn Übergang, Rastersondenmikroskop
摘要
申请公布号
DE69722702(D1)
申请公布日期
2003.07.17
申请号
DE1997622702
申请日期
1997.04.17
申请人
SEIKO INSTRUMENTS INC., CHIBA
发明人
TAKAHASHI, HIROSHI;SHIRAKAWABE, YOSHIHARU;SHIMIZU, NOBUHIRO
分类号
G01B7/16;G01B7/34;H01L29/84;(IPC1-7):G01B7/34;G01N27/00
主分类号
G01B7/16
代理机构
代理人
主权项
地址
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