| 发明名称 |
METHOD AND APPARATUS FOR WAFER LEVEL TESTING OF INTEGRATED OPTICAL WAVEGUIDE CIRCUITS |
| 摘要 |
A method of testing a planar lightwave circuit is achieved by coupling an optical probe to the planar lightwave circuit. In one embodiment, a second probe is used in combination with the first probe to test the planar lightwave circuit by sending and receiving a light beam through the planar lightwave circuit.
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| 申请公布号 |
WO03058190(A1) |
申请公布日期 |
2003.07.17 |
| 申请号 |
WO2002US39158 |
申请日期 |
2002.12.06 |
| 申请人 |
INTEL CORPORATION |
发明人 |
NIKONOV, DMITRI;MCCORMACK, MARK |
| 分类号 |
G01M11/00;(IPC1-7):G01M11/00 |
主分类号 |
G01M11/00 |
| 代理机构 |
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