发明名称 Back diffusion preventer for tubular - furnace
摘要 <p>The arrangement blocks diffusion of atmospheric air into open processing tube which is swept by a stream of protective gas. Tubular furnace of this kind is used for making of semi-conductor materials. The gas outlet end of the tube is screened by a flow of gas issuing from a flared end of a thin tube which crosses the flow path of the main flow stream. This tube is bent at the tubular furnace centre and gas issues in the same direction as the main flow stream. The thin tube is bent as a clip to fasten on the larger tube end.</p>
申请公布号 DE1946384(A1) 申请公布日期 1971.03.18
申请号 DE19691946384 申请日期 1969.09.12
申请人 SIEMENS AG 发明人 GROSCHWITZ,EBERHARD,DIPL.-PHYS.DR.
分类号 C30B25/14;C30B31/10;C30B31/16 主分类号 C30B25/14
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