| 摘要 |
An alignment tool, method and system for aligning a cassette handler to a robot blade in a workpiece handling system so as to compensate for tilt exhibited by an elevator shaft as the cassette is elevated between various slot positions. In one embodiment, the cassette tilt angle may be measured at a first height of the cassette. After activating the elevator to raise the cassette to a second slot position, preferably near the other end of the cassette, the tilt angle of the cassette may be measured again. If the tilt angle has changed, such change has likely been induced by the elevator. The cassette tilt angle may be adjusted in accordance with the measured angle at which the elevator shaft tilts the cassette as the cassette is raised or lowered to reduce accidental breakage or damaging of wafers or other workpieces. |
