发明名称 |
A CLEANING AGENT COMPOSITION FOR A POSITIVE OR A NEGATIVE PHOTORESIST |
摘要 |
The present invention relates to a composition for cleaning a photoresist and is to provide a cleaning composition wherein the residue of the photoresist does not remain on the boundary surface between the cleaned area and the not-cleaned area after a negative photoresist containing pigment is cleaned, soft-baked, exposed and developed. The present invention provides a composition for cleaning a positive or negative photoresist which comprises (a) from 0.1 to 20 wt.% of and alkyl oxide polymer with a molecular weight of from 50 to 2000 and (b) from 80 to 99.9 wt.% of an organic solvent comprising: (b-1) from 1 to 20 parts by weight of dipropylene glycol methyl ether (DPGME), from 10 to 50 parts by weight of N-methyl pyrolidone (NMP) and from 50 to 90 parts by weight of methyl isobutyl ketone (MIBK), or (b-2) from 10 to 90 parts by weight of dimethyl formaldehyde (DMF) or dimethylacetamide (DMAc) and from 10 to 50 parts by weight of n-butyl acetate. |
申请公布号 |
WO03058350(A1) |
申请公布日期 |
2003.07.17 |
申请号 |
WO2003KR00030 |
申请日期 |
2003.01.09 |
申请人 |
CLARIANT INTERNATIONAL LTD.;OH, SAE-TAE;KANG, DOEK-MAN;CHOI, KYUNG-SOO |
发明人 |
OH, SAE-TAE;KANG, DOEK-MAN;CHOI, KYUNG-SOO |
分类号 |
C11D3/37;C11D7/26;C11D7/32;C11D11/00;G03F7/16;G03F7/42;H01L21/027;H01L21/304 |
主分类号 |
C11D3/37 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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