The present invention relates to novel negative−working, photoimageable, and aqueous developable antireflective coating compositions and their use in image processing by forming a thin layer of the novel antireflective coating composition between a reflective substrate and a photoresist coating. The negative bottom photoimageable antireflective coating composition is capable of being developed in an alkaline developer and is coated below a negative photoresist.
申请公布号
WO03058345(A2)
申请公布日期
2003.07.17
申请号
WO2003EP00067
申请日期
2003.01.07
申请人
CLARIANT INTERNATIONAL LTD;CLARIANT FINANCE (BVI) LIMITED
发明人
OBERLANDER, JOSEPH, E.;DAMMEL, RALPH, R.;DING-LEE, SHUJI;NEISSER, MARK, O.;TOUKHY, MEDHAT, A.