发明名称 |
Wringing-together optical elements meeting prescribed standards of form and surface quality, first varies surface profile using active material to enable exact positioning |
摘要 |
The surface(s) to be wrung together (process analogous to wringing gauge blocks together) are varied in form. This is achieved by use of an active material (3). It causes a change in shape, enabling precise relative positioning of the elements. Following this, the change is removed continuously, until the elements have wrung together in a precisely-conforming fit.
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申请公布号 |
DE10200243(A1) |
申请公布日期 |
2003.07.17 |
申请号 |
DE20021000243 |
申请日期 |
2002.01.05 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
MOELLER, TIMO;ROS-MESEMER, MARTIN;HOELLER, FRANK |
分类号 |
C03C27/06;G02B7/00;G02B27/62;G03F7/20;(IPC1-7):G02B3/00;B23K20/00;C03C27/00 |
主分类号 |
C03C27/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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