发明名称 Wringing-together optical elements meeting prescribed standards of form and surface quality, first varies surface profile using active material to enable exact positioning
摘要 The surface(s) to be wrung together (process analogous to wringing gauge blocks together) are varied in form. This is achieved by use of an active material (3). It causes a change in shape, enabling precise relative positioning of the elements. Following this, the change is removed continuously, until the elements have wrung together in a precisely-conforming fit.
申请公布号 DE10200243(A1) 申请公布日期 2003.07.17
申请号 DE20021000243 申请日期 2002.01.05
申请人 CARL ZEISS SMT AG 发明人 MOELLER, TIMO;ROS-MESEMER, MARTIN;HOELLER, FRANK
分类号 C03C27/06;G02B7/00;G02B27/62;G03F7/20;(IPC1-7):G02B3/00;B23K20/00;C03C27/00 主分类号 C03C27/06
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