ARC VACUUM PUMP

摘要

An arc vacuum pump which includes a housing, a getter material source, and a plurality of Penning discharge cells. Each Penning cell includes: an anode made of non-ferromagnetic material, a plurality of cathodes of which at least a first cathode has at least one orifice, the orifice dimensioned to channel entering getter material within the electron layer of the cell so that the plasma does not reach the anode. The first cathode is made of a magnetically conductive material. The cell also includes a magnet positioned outside of the housing, proximate to a second cathode. The second cathode is part of the housing wall. A magnet conductor is positioned outside the housing proximate to the magnet and in magnetic communication with the first cathode thereby forming a confining magnetic system with the first cathode and the magnet for confining the discharge of the cell.