METHOD FOR MANUFACTURING STAMPER FOR INFORMATION MEDIUM MANUFACTURE, STAMPER, AND PHOTORESIST MASTER DISK

摘要

A stamper having a sharp uneven pattern is manufactured, and an information medium of high accuracy is manufactured by using the stamper. A light absorbing layer (103) and a photoresist layer (104) of a thickness (T) larger than 180 nm are formed in this order on a substrate (102), a latent image is formed in the photoresist layer (104) and developed to form an uneven pattern (106), and a photoresist master disk (100) is manufactured. In addition, an Ni thin film (108) is formed on the uneven pattern (106) on the photoresist master disk (100) by electroless plating, an Ni film (110) is formed on the Ni thin film (108) by the electroforming, and the Ni thin film (108) and the Ni film (110) are separated from the photoresist master disk (100) to manufacture a stamper (120).