Apparatus and method for improving throughput in a cluster tool for semiconductor wafer processing

摘要

An apparatus and method for processing semiconductor wafers is provided. The apparatus comprises a first buffer chamber having a first robot and a second buffer chamber having a second robot. At least one load lock is coupled to the first buffer chamber and the second buffer chamber where the first and second robots can access at least one of said load locks. A plurality of process chambers are disposed about the first and second buffer chambers.