APPARATUS AND METHOD FOR THERMAL MANAGEMENT OF A MASS FLOW CONTROLLER

摘要

A thermal mass flow controller (100) includes a sensor assembly (102), a valve assembly (104), and a mass flow controller housing (108). A thermal ground (148) limits the conductive thermal path between the mass flow controller housing (108) and the sensor assembly (102) and due to the limited cross-section of the thermal ground (148), substantially eliminates externally imposed thermal gradients within the sensor assembly (102). The controller (100) also includes a thermally dissipative element that conducts thermal energy along a path from the valve assembly away from the sensor assembly.