发明名称 METHOD FOR CLEANING AN ARTICLE
摘要 A method for cleaning an article includes the steps of contacting the article with a solvent fluid that includes carbon dioxide, whereby contaminants on the article dissolve in the solvent fluid and displacing the solvent fluid with a displacing fluid, that is other than carbon dioxide. In one aspect, the displacing fluid is at a temperature and pressure sufficient to prevent forming a second phase in the solvent fluid being displaced and at least a portion of the carbon dioxide is recycled to the article. In another aspect, the pressure of the solvent fluid is reduced prior to its displacement with the displacing gas.
申请公布号 CA2472478(A1) 申请公布日期 2003.07.17
申请号 CA20032472478 申请日期 2003.01.07
申请人 PRAXAIR TECHNOLOGY, INC. 发明人 BILLINGHAM, JOHN FREDERIC
分类号 B08B7/00;C11D7/04;C11D7/06;C11D7/08;C11D7/30;C11D7/50;C11D11/00;H01L21/027;H01L21/304;(IPC1-7):B08B3/00;G03F7/42;H01L21/00 主分类号 B08B7/00
代理机构 代理人
主权项
地址