Process for producing titanium material for target, titanium material for target, and sputtering target using the same

摘要

A titanium material for a target has a microstructure in which the grain size is small and uniform and also has a macrostructure of the surface of the titanium material which is non-patterned and is excellent in surface property. A titanium ingot in which Vacuum Arc Remelting or Electron Beam Melting is performed is roughly forged at a temperature from 700° C. up to the beta transformation temperature, and is then forged for finishing at room temperature to 350° C., and is finally annealed.