摘要 |
A mounting device, comprising an XY table (25) for holding a substrate (21) allowing parts (3) to be mounted thereon, mounting parts (20) for mounting the parts (3), and drive devices (10, 14, 23, 24) for moving each part, wherein the rotating speed of the drive devices (10, 14, 23, 24) can be reduced when an effective torque calculated by effective torque detection parts (27, 36) exceeds a specified upper limit value at an effective torque judgment parts (28, 37). |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;TAKAHASHI, TORU;FUJIKAWA, MAKOTO |
发明人 |
TAKAHASHI, TORU;FUJIKAWA, MAKOTO |