发明名称 SPECTRAL MEASURING DEVICE
摘要 A spectral measuring device, wherein a holder (30) for holding a specimen (100) is disposed on the outside of a vacuum chamber (50) having a light transmitting window (52a), a light radiating part having a light detection part and a terahertz light generator (6) is fixed to a base (53) disposed in the vacuum chamber and radiates terahertz pulse light to the specimen (100) on the outside of the vacuum chamber through the light transmitting window (52a) and specimen light from the specimen (100) is received by the light detection part through the light transmitting window (52a), and the base (53) in the vacuum chamber and the holder (30) on the outside of the vacuum chamber are connected to each other through a connection member (54a) passed through the partition wall of the vacuum chamber (50) so as to be airtight against and displaceable relative to the partition wall and so that the relative positions thereof can be fixed.
申请公布号 WO03058212(A1) 申请公布日期 2003.07.17
申请号 WO2002JP13647 申请日期 2002.12.26
申请人 NIKON CORPORATION;TOCHIGI NIKON CORPORATION;USAMI, MAMORU;IWAMOTO, TOSHIYUKI 发明人 USAMI, MAMORU;IWAMOTO, TOSHIYUKI
分类号 G01N21/03;G01N21/35;(IPC1-7):G01N21/01 主分类号 G01N21/03
代理机构 代理人
主权项
地址