Regeneration of a cryopump,申请号EP19990104588-传众专利搜索

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发明名称	Regeneration of a cryopump
摘要
申请公布号	EP0919722(B1)	申请公布日期	2003.07.16
申请号	EP19990104588	申请日期	1995.04.26
申请人	EBARA CORPORATION	发明人	NOJI, NOBUHARU;HAYAKAWA, JUNICHI;SATOH, MOTOYASU;AONO, HIROSHI;KOMAI, TETSUO
分类号	F04B37/08;F04B49/06;(IPC1-7):F04B37/08	主分类号	F04B37/08
代理机构		代理人
主权项
地址

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