| 摘要 |
PURPOSE: A high-pressure valve having two bellows and two sealing parts is provided to preventing the contamination of a vacuum process chamber by minimizing backflow of polluters such as powders or particles. CONSTITUTION: A high-pressure valve(100) includes a main body(110), the first line(104), the second line(106), the first bellows(124), and the second bellows(144). The main body includes a valve room(112) in which the first O-ring(120) and the second O-ring(140) are installed. The first line is used for connecting the valve room to a vacuum process chamber(150). The second line is used for connecting the valve room to a vacuum pump(160). The first bellows has the first head(122) which is installed in the valve room in order to switch an exhaust path and glued to the first O-ring by the fluid of the outside. The second bellows has the second head(142) which is glued to the second O-ring by the fluid of the outside.
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