| 摘要 |
PURPOSE: An inspection apparatus for measuring a pellicle rotation state of mask and its inspection method are provided to be capable of improving the accuracy of measurement by using calipers and minimizing the adsorption of particles on the pellicles. CONSTITUTION: An inspection apparatus is provided with a work table(140) used as a base portion capable of being installed with an arbitrary apparatus, a rotator(100) capable of being rotated, installed on the work table for loading a mask(120) attached with pellicles(130) using a loading part(110), a measuring part(200) installed near the lateral portion of the rotator on the work table for measuring the distance between the edge portion of the mask and the pellicles using a calipers(210), and a measuring part fixing valve capable of moving and fixing the measuring part using an air cylinder(220).
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