| 摘要 |
Known component suspensions either use six parallel double-jointed members (hexapods) that while being adjustable with six degrees of freedom and high accuracy can only be adjusted in mutual dependency of one another, or double-jointed members that are mounted in series via connecting bodies and whose joints can be rotated about one axis, that allow only two rotational deflections, under error summation, and that meet in a virtual point as the point of origin of a Cartesian coordinate system. The aim of the invention is to design a suspension that allows a movement of the component in all six degrees of freedom in a highly accurate, reproducible manner while maintaining the axial rigidity of the component. To this end, six parallel double-jointed members (2J1, 2J2, 2J3, 2J4, 2J5 2J6) comprising two joints (J1, J2) each that can be rotated about three axes are distributed in the coordinate planes (XY<XZ, ZY) in such a manner that the rotational (xrot, yrot, zrot) and translational (xtrans, ytrans, ztrans) deflections can be achieved by adjusting, if possible, only one double-jointed member (2J1, 2J2, 2J3, 2J4, 2J5 2J6) (defined adjustment). The joints (J1, J2) preferably used in the double-jointed members (2J1, 2J2, 2J3, 2J4, 2J5 2J6) are flexible joints (J1, J2), especially elastic fiber joints. The inventive joints can be used in suspensions of optical components, especially mirrors.) |
