| 摘要 |
A method for manufacturing an organic EL display device is provided, capable of improving an opening ratio and providing narrower pitches for narrowing non-lighting portion between pixels, and, at the same time, capable of eliminating short-circuiting between display pixels for eliminating cross-talk and non-lighting pixels. In the deposition process of the cathode 6, the incident angle of the deposition material onto the substrate is optimized by optionally changing parameters such as a distance between the substrate 1 and the mask 11 and a distance between the substrate and the point deposition source 13. Thus, deposition material from a plurality of deposition sources impinges onto the substrate surface obliquely passing at a different incident angles though opening (slits 11a) of the mask 11, so that the width 10 of the electrode pattern 6 becomes broader than the width of the slit by superposition of the deposition material passing through the slits at different incident angles.
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