INJECTOR HAVING HEATER

摘要

PURPOSE: An injector having a heater is provided to maintain a vaporized state of a source material in an injecting process of the vaporized source material to a wafer by forming the injector and the heater with one body. CONSTITUTION: An injector having a heater includes an injector(220) and a heater(210). The injector is used for injecting the vaporized metallic-organic source material into the inside of a process chamber. The heater is used for surrounding the injector. The heater includes a resistance as a heating member in order to heat the injector. A combination terminal(216) is vertically projected from an outer surface of the heater. A thermocouple(217) and an electric wire(218) are connected to the heater. The heater includes the first serve heater having the resistance and the second serve heater having the resistance. The first serve heater is coupled to the second serve heater.