发明名称 DEVICE FOR ELLIPSOMETRIC TWO-DIMENSIONAL DISPLAY OF A SAMPLE, DISPLAY METHOD AND ELLIPSOMETRIC MEASUREMENT METHOD WITH SPATIAL RESOLUTION
摘要 A device for ellipsometric two-dimensional display of a sample placed in an incident medium, observed between an analyser and a polarizer intersected by convergent light reflection, wherein the ellipsometric parameters of the assembly formed by the sample and a substrate whereon it is placed, are used. The substrate comprises a support and a stack of base layers and its ellipsometric properties are known. The ellipsometric properties of the substrate are such that variations of the sample ellipsometric parameters are displayed with contrast higher that the contrast produced in the absence of the substrate. The invention also concerns a display method and an ellipsometric measurement method with spatial resolution.
申请公布号 KR20030061006(A) 申请公布日期 2003.07.16
申请号 KR20037008184 申请日期 2001.12.18
申请人 发明人
分类号 G01N21/21;G01N21/64;G01B11/06;G01N21/17;G01N21/27;G01N37/00 主分类号 G01N21/21
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