Polishing apparatus

摘要

A polishing apparatus for polishing a workpiece, said apparatus comprising: a turntable (5) with a polishing cloth (6) mounted on an upper surface thereof; a top ring (1) for holding a workpiece and pressing the workpiece against said polishing cloth under a first pressing force to polish the workpiece; a presser ring (3) positioned outwardly of said top ring, said presser ring and said top ring making relative vertical movement eath other; a pressing device for pressing said presser ring (3) against said polishing cloth (6) under a second pressing force (F2) which is variable; and a cleaning liquid supply device (40) for supplying a cleaning liquid to a clearance (3h) between said top ring and said presser ring (3).