发明名称 Monitoring an effluent from a chamber
摘要 An effluent monitoring apparatus 10 comprising an energizing cell 22 adapted to receive an effluent, a gas energizer 17 that is capable of energizing the effluent in the cell 22 thereby emitting a radiation, a radiation permeable window 27 that is spaced apart from the wall 36 of the 22 cell by a distance d that is sufficiently high to reduce a deposition of effluent residue from the energized gas on the window 27, and a detector 26 to detect the radiation.
申请公布号 US6592817(B1) 申请公布日期 2003.07.15
申请号 US20000540771 申请日期 2000.03.31
申请人 APPLIED MATERIALS, INC. 发明人 TSAI KENNETH;BACH TUNG;PHAM QUYEN
分类号 B01J19/08;C23C14/00;C23C16/44;H01J37/32;H01L21/02;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):G01N33/00 主分类号 B01J19/08
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