发明名称 |
Filter apparatus and method therefor |
摘要 |
An ultrasonic driver (105) is used to vibrate a filter disk (103) at ultrasonic frequencies. Vibrations are used to break up agglomerates into smaller pieces that pass through filter disk (103). The energy is controlled to minimize the translational energy given to the particles as they are broken up to prevent reagglomeration. The frequency and amplitude of the vibration is controlled to operate out of or in low energy cavitation.
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申请公布号 |
US6592708(B2) |
申请公布日期 |
2003.07.15 |
申请号 |
US20020142682 |
申请日期 |
2002.05.10 |
申请人 |
MOTOROLA, INC. |
发明人 |
VANELL JAMES F. |
分类号 |
B01D29/01;B01D29/075;B01D29/72;B01D29/86;B01D35/02;B01D35/20;B03B5/00;B24B37/04;B24B57/00;B24B57/02;H01L21/302;H01L21/304;H01L21/306;H01L21/3105;H01L21/461;(IPC1-7):H01L21/306 |
主分类号 |
B01D29/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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