发明名称 |
Structure and method of fabrication for an optical switch |
摘要 |
A structure for an optical switch includes a reflective layer formed over a high quality epitaxial layer of piezoelectric compound semiconductor materials grown over a monocrystalline substrate, such as a silicon wafer. The piezoelectric layer can be activated to alter the path of light incident on the reflective layer. A compliant substrate is provided for growing the monocrystalline compound semiconductor layer. An accommodating buffer layer comprises a layer of monocrystalline oxide spaced apart from a silicon wafer by an amorphous interface layer of silicon oxide. The amorphous interface layer dissipates strain and permits the growth of a high quality monocrystalline oxide accommodating buffer layer. The accommodating buffer layer is lattice matched to both the underlying silicon wafer and the overlying piezoelectric monocrystalline material layer.
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申请公布号 |
US6594414(B2) |
申请公布日期 |
2003.07.15 |
申请号 |
US20010911492 |
申请日期 |
2001.07.25 |
申请人 |
MOTOROLA, INC. |
发明人 |
TUNGARE AROON;LIAN KERYN;LEMPKOWSKI ROBERT;BARENBURG BARBARA FOLEY |
分类号 |
G02B6/35;H01L21/20;(IPC1-7):G02B6/26;G02B6/42 |
主分类号 |
G02B6/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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