发明名称 Sensor held by base having lead
摘要 A pressure sensor has a sensor chip with a diaphragm formed therein and bumps formed thereon, and a stem with leads extending from a surface thereof to the sensor chip. The bumps and the leads are electrically connected by face down bonding so that a surface of the sensor chip faces the surface of the stem. In this manner, bonding wires are unnecessary. Therefore, an area for disposing the bonding wires in the stem can be cut down, so that the pressure sensor can be miniaturized.
申请公布号 US6591689(B2) 申请公布日期 2003.07.15
申请号 US20010894907 申请日期 2001.06.29
申请人 DENSO CORPORATION 发明人 NIDAN AKIRA;TAKI TAKAFUMI;HARA HIDEAKI;MASUDA MICHIHIRO;BAN KANAME;TANAKA KAZUO;MURAKAMI YOSHIFUMI
分类号 G01L9/04;G01L9/00;H01L29/84;(IPC1-7):G01L9/16 主分类号 G01L9/04
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