| 摘要 |
A plant for processing wafers, having a plurality of fabrication units, a plurality of measuring units, and a transport system for transporting the wafers. The fabrication units and the measuring units are each assigned a registration system. The feeding-in and discharge of the wafers to and from the respective fabrication unit or measuring unit can be registered in order to determine the wafer occupancy in the unit. Depending on this occupancy, a supply request or disposal request can be generated for the respective fabrication unit and measuring unit.
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