发明名称 |
Method and apparatus for the production of thin films |
摘要 |
Method and apparatus for forming thin films by the application of a film forming liquid to a substrate at rest or rotating a speed up to 500 rpm and then rotating the film forming liquid on the substrate at a speed and for a time sufficient to form the thin film. Such films can be used for analysis by spectrophotometric methods. Apparatus for forming such thin films is also disclosed.
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申请公布号 |
US6594008(B1) |
申请公布日期 |
2003.07.15 |
申请号 |
US20000722978 |
申请日期 |
2000.11.27 |
申请人 |
HERPST ROBERT D. |
发明人 |
HERPST ROBERT;CUTHBERT KENNETH B. |
分类号 |
G01N21/27;B05C11/08;B05D1/00;B05D1/40;G11B5/84;(IPC1-7):G01J1/10 |
主分类号 |
G01N21/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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