发明名称 Wafer retainer
摘要 A wafer retainer is disclosed to be fastened to the inner surface of the door panel of a wafer carrier without making openings in the inner surface of the door panel, the wafer retainer having at least one frame bar, retaining portions and positioning elements respectively extended from the at least one frame bar for fastening to respective locating elements at the inner surface of the door panel and retaining portions at the lateral sidewall of a recessed area, and a plurality of spring arms respectively extended from the at least one frame bar at different elevations and adapted to hold a corresponding storage wafer in the wafer carrier, each spring arm having a smoothly arched top end adapted to contact one point of the corresponding storage wafer to minimize friction.
申请公布号 US6591987(B2) 申请公布日期 2003.07.15
申请号 US20010987313 申请日期 2001.11.14
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 WU TZONG-MING;HSIEH CHIH-LUN;HO TIEN-LU
分类号 H01L21/673;(IPC1-7):B65D85/48;B65D85/90 主分类号 H01L21/673
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