| 摘要 |
PROBLEM TO BE SOLVED: To provide a system for treating ozone which appropriately assures the supply of high-frequency power for ozone generation and precisely avoids a hindrance due to the stopping of ozone generation. SOLUTION: This system for treating ozone is provided with ozone generators 5-1, 5-2, inverters 2-1, 2-2 which supplies high-frequency power generating ozone to the ozone generators 5-1, 5-2, an inverter 2-3 which preliminarily supplies high-frequency power generating ozone to the ozone generators 5-1, 5-2 and select switches 7-1, 7-2, 7-3 and select switches 8-1, 8-2, 8-3 for switching the inverters 2-1, 2-2 to the inverter 2-3. Therein, the inverters 2-1, 2-2 are switched to the inverter 2-3 by means of the select switches 7-1, 7-2, 7-3 and the select switches 8-1, 8-2, 8-3 in accordance with the detection of an abnormality which influences the ozone generation in the inverters 2-1, 2-2. COPYRIGHT: (C)2003,JPO
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