发明名称 |
Piezoelectric print-head and method of manufacture |
摘要 |
A piezoelectric ink-jet printhead that uses a metallic layer and a thick film layer with a slot hole therein instead of a ceramic vibration plate and an ink layer. The piezoelectric layer and the upper electrode layer are formed inside the ink cavity so that overall thickness of the print head is reduced. To form the ink-jet print head, a metallic layer and a lower electrode layer are sequentially formed over a substrate. A patterned piezoelectric layer and an upper electrode layer are sequentially formed over the lower electrode layer. A patterned thick film layer with a slot hole therein is formed over the metallic layer. The thick film layer and the metallic layer together form a cavity that encloses the piezoelectric layer and the upper electrode layer. A nozzle plate having a nozzle thereon is attached to the thick film layer. The nozzle plate, the thick film layer and the metallic layer together form an ink cavity. The hole in the nozzle is continuous with the ink cavity.
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申请公布号 |
US6592210(B2) |
申请公布日期 |
2003.07.15 |
申请号 |
US20020064716 |
申请日期 |
2002.08.09 |
申请人 |
NANODYNAMICS, INC. |
发明人 |
LIN CHEN-HUA;LU WEN-CHUNG;YANG MING-HSUN;CHEN GUEY-CHYUAN;HSU CHIH-CHIEH |
分类号 |
B41J2/045;B41J2/055;B41J2/14;B41J2/16;(IPC1-7):B41J2/045 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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