Method of and apparatus for measuring lattice-constant, and computer program

摘要

A condenser angle of 0.5 mrad or below is set with respect to a specimen. Electron-beam diameter of 20 to 100 nm phi is set onto the surface of the specimen. A flux of highly parallel electron beams is irradiated onto the specimen having a strained layer quantum well structure. An image of electrons diffracted from the specimen is recorded onto an imaging plate. The recorded image is analyzed. Lattice constants and strains of layers of the strained layer quantum well structure are measured based on a result of this analysis.