| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for stably manufacturing synthetic quartz glass which is excellent in light resistance and light transmissivity and which contains high concentration of fluorine. SOLUTION: The method incorporates a process for controlling OH group content in the porous quartz glass by holding the porous quartz glass in a steam-containing atmosphere, a process for doping the porous quartz glass with fluorine and simultaneously reducing the OH group content by holding the porous quartz glass in a fluorine compound-containing atmosphere and a process for obtaining a transparent quartz glass body by heating the porous quartz glass at≥1,300°C and converting the porous quartz glass to transparent glass. COPYRIGHT: (C)2003,JPO |
