MIS semiconductor device having an elevated source/drain structure

摘要

In the first aspect of the invention, a semiconductor device can effectively suppress the adverse short channel effect and the possible occurrence of junction leak current and has a low resistance diffusion layer to realize a short propagation delay time as a plurality of side wall films 4, 5 are formed at least in a part of the area between the gate electrode 3 and an elevated region 8 by laying a plurality of films in an appropriate order.