METHOD OF MANUFACTURING MICRO ELECTRO MECHANICAL SYSTEM ELEMENT

摘要

PROBLEM TO BE SOLVED: To flatten a surface of a drive side electrode in an electrostatic drive type MEMS element. SOLUTION: A substrate side electrode is formed on a substrate. A fluid film is formed before or after forming a sacrifical layer. A beam having a drive side electrode is formed on a flattened surface and then the sacrifical layer is removed. COPYRIGHT: (C)2003,JPO