| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser beam cutting device for extremely thin metallic plate in which the fluctuation of the position of a focal point due to an assist gas is suppressed by a simple construction. SOLUTION: In a laser beam cutting work of such an extremely thin metallic plate as a metal mask, a laser beam L is irradiated from a nozzle 6 of a machining head 3 provided with a condenser lens 4 and an assist gas AG is jetted from the nozzle 6. In the device, a magnet bolder 7 incorporating a magnet 8 is provided at the lower part of the machining head 3 in a manner that the magnet holder surrounds the outer peripheral part of the nozzle, and a supporting plate 12 of a magnetic material is provided immediately under the magnet holder 7 in a manner that the supporting plate does not move in a plane. Thus, the magnet 8 attracts the supporting plate 12 and a work W tightly contacts with the magnet holder 7 and a distance between the condenser lens 4 and the surface of the work is kept constant.</p> |
