,申请号JP19930159168-传众专利搜索

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发明名称
摘要
申请公布号	JP3425994(B2)	申请公布日期	2003.07.14
申请号	JP19930159168	申请日期	1993.06.29
申请人		发明人
分类号	B01J3/02;H01L21/027;H01L21/30;H01L21/68;(IPC1-7):B01J3/02	主分类号	B01J3/02
代理机构		代理人
主权项
地址

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