Semiconductor device and its manufacturing method,申请号KR20020048716-传众专利搜索

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发明名称	Semiconductor device and its manufacturing method
摘要
申请公布号	KR20030060048(A)	申请公布日期	2003.07.12
申请号	KR20020048716	申请日期	2002.08.17
申请人	MITSUBISHI ELECTRIC CORP	发明人	NAOHITO SAWADA;MATSUHIRO TOBI;KOJI ODA
分类号	H01L21/316;H01L21/768	主分类号	H01L21/316
代理机构		代理人
主权项
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