| 摘要 |
PROBLEM TO BE SOLVED: To improve a coma-free axis adjustment method in a transmission type electron microscope. SOLUTION: In this coma-free axis adjustment method, one TEM image is observed and the direction of incident electrons should be adjusted while viewing the TEM image. For instance, in one embodiment, the tilt angle of the incident electrons should be adjusted so that a transmission spot formed by transmitted electrons coincides with the center of a caustic surface by scattered electrons. Minimum devices required for utilizing the principle of this application are a device for converging the incident electrons into a minute size, a device for forming a defocused TEM image and a device for observing the TEM image. COPYRIGHT: (C)2003,JPO
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