| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a laminate type piezoelectric ceramic element, which is superior in piezoelectric characteristics and shows high reliability. <P>SOLUTION: In the laminate type piezoelectric ceramic element where inner electrodes containing alloy, which has Ag as main component, are formed via ceramic layers, the ceramic layers and the inner electrodes are simultaneously baked and are re-baked in atmosphere having oxygen concentration of 10% or less. <P>COPYRIGHT: (C)2003,JPO |
